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.com
Volume 4, Issue 4 (Suppl)
J Laser Opt Photonics, an open access journal
ISSN: 2469-410X
Optics 2017
November 15-17, 2017
November 15-17, 2017 | Las Vegas, USA
8
th
International Conference and Exhibition on
Lasers, Optics & Photonics
The MOCVD overgrowth studies of III-Nitride on Bragg grating for distributed feedback lasers
Junze Li
Microsystem and Terahertz Research Center, China
G
allium nitride lasers, especially the single-mode distributed feedback (DFB) lasers using Bragg gratings own potential
applications in communication systems due to their high-speed modulation. For the blue-violet light, the value of a period
of the first-order diffraction grating is about 80 nm. This poses a big challenge when forming the high precision grating and
nitride overgrowth based on it. We fabricated the fine step shape structure of first-order and 3rd order grating by nanoimprint
and inductively coupled plasma (ICP) dry etching and we proceeded with an epitaxial regrowth of AlGaN layer with 6% to
12% Al content. Then we designed a series of gratings with different period, depths and duty ratios to study the influence of
grating structure on nano-heteroepitaxy. And we improved the overgrowth by enhancing the growth temperature as high
as 1450°C. Moreover, we observed the nucleation and growth process by step-by-step growth to study the growth mode for
nitride overgrowth on grating, under the condition that the grating period was larger than the mental migration length on the
surface. These samples were analyzed structurally by high-resolution transmission electron microscopy (HRTEM) and space-
spectrally by cathodoluminescence (CL). The growth dynamics analysis of the nitride nano-epitaxial in this research is one of
the frontier areas of nitride photoelectric devices, which is not only meaningful in semiconductor material physics, but also
important for related scientific researches and applications.
Biography
Junze Li has completed his PhD from Peking University. He is working as the Research Assistant of Microsystem & Terahertz Research Center of China Academy
of Engineering Physics (CAEP). He has published more than 20 papers in reputed journals.
lijunze@mtrc.ac.cnJunze Li, J Laser Opt Photonics 2017, 4:4 (Suppl)
DOI: 10.4172/2469-410X-C1-017