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Volume 4, Issue 4 (Suppl)

J Laser Opt Photonics, an open access journal

ISSN: 2469-410X

Optics 2017

November 15-17, 2017

November 15-17, 2017 | Las Vegas, USA

International Conference and Exhibition on

Lasers, Optics & Photonics

On-chip integrated a 3D-CMOS Si photodetector array with a fiber couplers platform for remote

optical fiber monitoring

Iman Sabri Alirezaei, Joerg Vierhaus

and

Edmund P Burte

Otto-von-Guericke University of Magdeburg, Germany

silicon-based photodetector array with on-chip integration to tiny fiber strands on a single chip is fabricated using

3D-complementary metal-oxide-semiconductor (CMOS) and microelectromechanical systems (MEMS) technology. The

3D-detector involves a vertical photoactive area as large as the fiber diameter for direct butt-coupling to the optical fiber. Novel

ultra-deep trench isolation with a passivation method is carried out to overcome the leakage current as well as the surface

recombination current and the dark current, which arise from the fabrication of the ultra-deep trenches. The passivation

method consisting of SU-8 polymer enables to implement the deep trenches with a depth of 30μm for both the vertical

photoactive area and the inter-pixel trench isolation in the CMOS process. All pixels in the linear array are held at the same

applied reverse voltage, by stacking the interconnection line across the pixels. Besides, a tapered U-groove array is built on

the monolithically integrated fiber couplers platform for chip-level fiber insertion. This detector shows an external quantum

efficiency of 63.82%, corresponding to the photoresponsivity of 0.32A/W, at a wavelength of 631nm for 2V reverse bias. The

proposed detector array integrated into a fiber bundle is very promising to apply for remote optical fiber sensing applications

in harsh environments, where involve high electromagnetic fields or RF signals such as magnetic resonance imaging (MRI) or

positron emission tomography (PET).

Biography

Iman Sabri Alirezaei received his MSc degree in Applied Physics from Shahid Beheshti University (SBU). He is currently doing his PhD and working as a Research

Assistant in Electrical Engineering at Institute of Micro and Sensor Systems, Magdeburg University. His current research interests include CMOS-MEMS devices,

micro- and nano-photonic devices, optical fiber sensors, integrated photodetectors and Lab-on-a-chip.

sabri.iman@ovgu.de

Iman Sabri Alirezaei et al., J Laser Opt Photonics 2017, 4:4 (Suppl)

DOI: 10.4172/2469-410X-C1-017